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In the constantly evolving field of ultra-high resolution tomography, x-rays are used to create nondestructive, high-resolution images of a sample at the sub-100 nm level. Precision motion equipment, such as linear and rotation stages, position and manipulate the various elements in a tomography experiment, including the sample that is being imaged, the x-ray beam, and the detector of camera. As x-ray beam cross-sections shrink and detector resolutions improve to nanometer-levels, the positioning performance of the motion equipment must be better than the desired resolution and measurement accuracy. This article will review the motion elements used in a typical synchrotron end station and discuss critical items that designers and engineers must consider when attempting to achieve reliable ultra-high resolution tomography results.
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